Recently, we announced the launch of our new EtchDefender™ coating, which is now available on all Conax quartz thermocouple sheaths for ASM®‡EPSILON®‡
reactors. Exclusively from Conax, this patented technology extends the life of quartz thermocouple sheaths in ASM®‡ EPSILON®‡
reactors up to 3X longer.
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
What does that mean for ASM®‡ EPSILON®‡
reactor owners in terms of dollars and
cents?
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
Even though TCs coated with EtchDefender™ cost more per thermocouple, ASM®‡ EPSILON®‡
‡ ASM® and EPSILON® are registered trademarks of ASM International. Neither Conax Technologies nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
reactor owners can reduce their overall spend with:
- Lower cost of TCs—Using fewer thermocouples at a higher price point, you could lower your annual TC spend by as much as 30%.
- Less reactor downtime—By eliminating 1 to 2 maintenance cycles, you could save $500 to $10,000 per cycle.
- Higher wafer productivity—Wafer throughput increases by 2% to 5% for a total of $25,000+ per reactor, per year.
- Higher wafer quality—Reduced likelihood of wafer contamination due to opening chamber for thermocouple changes is invaluable! Plus, there’s no change to the susceptor ring or recipe.
View our EtchDefender™ video below or click here to download a white paper. If you have questions, email Mike Ferraro.